E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C Automated-shippable door as described in

Automated-shippable door as described in ¶ 5

SEMI D31 has derived a formula to detect defects and blemishes in FPD in comparison with human eyes and CCD based instruments

Appropriate information is summarized in § 5

SEMI E74 — Specification for Vacuum Pump Interfaces – Turbomolecular Pumps

and dead band of a thermal mass flow controller (MFC)

E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C Automated-shippable door as described inThis Specification provides the structure of SEMIs Sensor Actuator Network (SAN) Standard. It provides the definition for interoperability with respect to SEMI SAN Standard compliant Sensor Actuator devices. This Standard specifies how devices interoperate on a network as part of the control system for equipment. This Specification, which is the root of the SAN Standard, defines the relationships of each of the other Specifications that are components