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G09500 - SEMI G95 - 後工程における450mmウェーハ用テープフレームカセットのためのロードポートの機械的インタフェースの仕様 StdPbc-0225 test methods
G09500 - SEMI G95 - 後工程における450mmウェーハ用テープフレームカセットのためのロードポートの機械的インタフェースの仕様 StdPbc-0225 test methods
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Description
test methods
The Test Method is applicable to both bulk and epitaxial silicon
The TSEM consists of equipment characteristics and behaviors that apply to this class of equipment
This Standard defines the TS-Clock object for accessing factory application and equipment time value and synchronization status
This Document is intended for point of use (POU) inert gas purifiers where inlet purity is 99
G09500 - SEMI G95 - 後工程における450mmウェーハ用テープフレームカセットのためのロードポートの機械的インタフェースの仕様 StdPbc-0225 test methodsAssembly & Packaging Global Technical Committee201364global Audits and Reviews Subcommittee20136www. semiviews. org www. semi. org 450mm450TFC450TFC 450mm450TFC450TFC 450TFC PGVAGVOHT450TFC Referenced SEMI Standards SEMI G88 Specification for Tape Frame for 450 mm Wafer SEMI G92 Specification for Tape Frame Cassette for 450 mm Wafer
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