P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks StdTpc-300 mm Carriers & Physical Interfaces This Specification covers requirements for

This Specification covers requirements for all grades of dichlorosilane (SiH2Cl2) used in the semiconductor industry

There are differing parameters for analysis already widely in use

flatted or notched compound semiconductor wafers

コスト，納期，および信頼性を最適化するために，適切なセキュリティ対策を装置に適用するガイドラインを提供する。

within the limits of the measurement equipment precision

P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks StdTpc-300 mm Carriers & Physical Interfaces This Specification covers requirements forThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 1, 2013. Available at www. semiviews. org and www. semi. org in June 2013; originally published November 2001; previously published November 2009. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not