G07900 - SEMI G79 - Specification for Overall Digital Timing Accuracy Revision:SEMI G79-0200 - Inactive This method is intended for

This method is intended for the application of the Karl Fischer titration to the determination of water in photoresists

SEMI E19 — Standard Mechanical Interface (SMIF)

A brief description of the theory of this Test Method is given in Related Information 1

この狭ピッチの容量25枚のFOBITは，SEMI E62で規定されている13枚ウェーハのFIMSインタフェースで使用されるように設計される。

or gaseous source

G07900 - SEMI G79 - Specification for Overall Digital Timing Accuracy Revision:SEMI G79-0200 - Inactive This method is intended forThis Standard was technically approved by the global Automated Test Equipment Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in May 2012; originally published February 2000. This Standard is intended to provide a minimum common definition of timing accuracy specifications for semiconductor automatic test equipment