F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal StdPbc-0725 SEMI E154 — Mechanical Interface

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

SEMI E43-0813 (Reapproved 1019)

Producers and users of the silicon wafers and reticles used in semiconductor manufacturing will also find it useful

本文書の目的は，半導体産業で使用されるトリメチルホスフィンに対する要求条件を標準化し，またこれらのスタンダードをサポートする試験手順を標準化することである。試験方法は，統計的に有効な結果を示している。

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F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal StdPbc-0725 SEMI E154 — Mechanical InterfaceThis Test Method covers a procedure for measuring particle removal characteristic of equipment fan filter unit (EFFU) installed inside equipment. Since EFFU is an assembly of particle filter, fan, and motor, the integrity of these parts is very important for the performance of EFFU. So a conventional particle removal test method for particle filters is not suitable to evaluate EFFU particle removal performance. This Test Method defines an evaluation