S02000 - SEMI S20 - Safety Guideline for Identification and Documentation of Energy Isolation Devices for Hazardous Energy Control StdPbc-0211 local operation

local operation

SEMI 3D4-0613 (first published)

SEMI文書，特にSEMI P35から構造や用語を引用している。

SEMI C36-0200 (technical revision)

although it may be used as a guideline for melts from blended materials

S02000 - SEMI S20 - Safety Guideline for Identification and Documentation of Energy Isolation Devices for Hazardous Energy Control StdPbc-0211 local operationThis standard was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 29, 2008. It was available at www. semi. org in October 2008. Originally published March 2003. NOTICE: This document was balloted and approved for withdrawal in 2008. This guideline is intended to establish a method for the unique identification of Energy Isolation