F02100 - SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類 StdTpc-Package Test Methods This Document covers requirements for

This Document covers requirements for hydrogen chloride used in the semiconductor industry

SEMI E22-91 (first published)

The Test Method is for use with commercially available carbon analyzers which are based on combustion in an induction furnace principle and use infrared detector as the measuring technique

and other components as a measure of the effectiveness of passivation

0008 and 2000 Ω·cm for p-type silicon and between 0

F02100 - SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類 StdTpc-Package Test Methods This Document covers requirements forNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Facilities CommitteeNorth American Facilities Committee2002829 North American Regional Standards Committee20029www. semi. org2002111995 1 Referenced SEMI Standards None.