TEL Tokyo Electron 300mm Wafer 2 Nozzle COT Coat Process Station Lithius Surplus Removed from a Nikon NSR-S202A

Removed from a Nikon NSR-S202A Step-and-Repeat Exposure System

Hine 853-4290-002 Process Chamber Elevator GaSonics 94-1118 06763-805 Working

Inventory # CONF-2451

Model No: MSTBOARD This Nikon S2015-064-4 is working surplus

Part No: 120-1004

TEL Tokyo Electron 300mm Wafer 2 Nozzle COT Coat Process Station Lithius Surplus Removed from a Nikon NSR-S202ATEL Tokyo Electron 300mm Wafer 2 Nozzle COT Coat Process Station Lithius Surplus Model No: COT Coat Process Station Removed from a TEL Tokyo Electron 300mm Clean Track Lithius System Sold As Is Parts List (approximation, parts may vary or not be included or installed) Part No: 5085 405081 1H, BASE ASSY Part No: 5087 400387 1C, E BOX ASSY Part No: 5087 400383 14, FRAME ASSY,MOTOR Part No: 5087 400384 18, 3PIN ASSY Part No: 5085 404544 1B, DRAIN ASSY