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P04400 - SEMI P44 - マスク装置向けオープン・アートワーク・システム・インターチェンジ・スタンダード（OASIS®）の仕様 Revision:SEMI P44-0709 - Superseded SEMI M40-1109 (technical revision)

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SEMI M40-1109 (technical revision)

bowing test and hot water test

509 defines has some ambiguity

8 mm × 202

With the standardized measurement method and a guide for standardized reporting of results

P04400 - SEMI P44 - マスク装置向けオープン・アートワーク・システム・インターチェンジ・スタンダード（OASIS®）の仕様 Revision:SEMI P44-0709 - Superseded SEMI M40-1109 (technical revision)global Micropatterning Committee2009513global Audits and Reviews Subcommittee20096www. semi. org20097CD ROM200511200811 OASISOASIS. MASK Referenced SEMI Standards SEMI P39 OASIS Open Artwork System InterchangeStandard

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