C00327 - SEMI C3.27 - 三フッ化ホウ素（BF3），シリンダ充填， 99.0%品質の仕様 Revision:SEMI C3.27-1102 (Reapproved 1011) - Superseded and Safety Guideline for Exhaust

and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

the meaning of its contents

来源于较低质量等级助熔剂的杂质元素或碳会影响分析数据的准确性，建议使用高纯度助熔剂。

both suppliers and purchasers can uniformly define epitaxial layer quality

This Standard covers 300 mm equipment only

C00327 - SEMI C3.27 - 三フッ化ホウ素（BF3），シリンダ充填， 99.0%品質の仕様 Revision:SEMI C3.27-1102 (Reapproved 1011) - Superseded and Safety Guideline for Exhaustglobal Gases Technical Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org1984200211 : (Si2H6) Referenced SEMI Standards SEMI C1 Specifications for Reagents SEMI C3 Specifications for Gases